Assembly Strategies for 3D-IC Integration

With the advent of 3D Integration concepts as a potential enabler for the continuation of Moore’s law, the aligned wafer bonding requirements have shifted significantly. Chip-to-wafer bonding and wafer reconstruction represent alternative or complementary solutions to improve yield and chip size flexibility; pros and cons of the two methods are reviewed in the presentation made at Semicon Japan 2008.

3D assembly by chip-to-chip (C2C) and chip-to-wafer (C2W) stacking enables the development of very high density, multifunction devices and satisfies the demand for higher packaging miniaturization.
The trend toward higher density packaging means that chipmakers are being pressed to use the 3rd dimension to increase density for their chip packages.

Several 3D packaging techniques exist: 

When combining Chip-to-wafer and wafer-to-wafer technologies it becomes possible to further extend the yield improvement together with higher throughput. The flexibility of S.E.T's device bonding equipment enables the reconstruction of a wafer mixing chips of various sizes and various technologies. Chips are placed face down onto a temporary carrier at defined positions allowing the surface of all chip to be on the same plan. The free space between chips is the fille with a material compatible with required subsequent process steps and the back side is grinded and polished to create the new rebuilt wafer. The chip-to-wafer technique provides a significant flexibility enhancement. Although assembly speed can be affected by a single chip placement, global throughput can be compared to wafer level packaging thanks to significant yield improvement. This technique offers the possibility of mixing technologies, combining compound semiconductors with standard silicon devices. It is also compatible with chip stacking using direct connection through flip chip techniques.

For chip stacking, the placement accuracy becomes more critical as the number of layers increases. The co-planarity of the layers is also an important factor. 3D considerations are crucial to assembly of MEMS devices, as well as other advanced 3D-structures, such as VCSEL arrays and smart pixel arrays. In all cases, 3D packaging requires unparalleled accuracy in the x-, y- and z-directions. S.E.T.'s Device Bonders provide this accuracy, with post-bond accuracy down to 0.5 µm and high leveling accuracy (20 µrad). All bonding techniques used for die attach and flip chip bonding can be applied: reflow, thermo-compression including Cu-Cu bonding, adhesive joining and even fusion bonding allowing for heterogeneous integration. Depending upon the interconnection density and the bonding technology used, picked and place machines or high accuracy die (flipped or not) bonders are used for attachment of the die to the wafer or to the previous die.

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